| 摘要 |
PURPOSE:To reduce surface resistance by press molding powder comprising In oxide and Sn oxide, then sintering at a given temperature and heat-treating the prepared sintered material in an oxygen-free atmosphere at a specific temperature. CONSTITUTION:Indium de powder and Sn oxide powder are blended and ground so as to give 70-78wt.% In content and 4-12wt.% Sn content in the objective sintered material to prepare blended powder having <=0.1mum average particle diameter. Then, the blended powder is press-molded in a mold under >=1ton/cm<2> and the molded article is sintered at <=1,350-<=1,550 deg.C for a given time. Then the sintered material is heat-treated in an oxygen-free atmosphere at 500-1,300 deg.C to give a sintered material ITO having >=80% relative density and low surface resistance. The mixed powder of the raw material is sintered at 500-1,300 deg.C under >=100kg/cm<2> to similarly give the same sintered material of ITO. |
