发明名称 STRUKTURIERTER HALBLEITERKOERPER.
摘要 Structurised semiconductor device has different doped Si monocrystal semiconductor zones bounded by barrier zone(s). The novel features are that: (a) there is a SiO2 film on at least one Si monocrystalline semiconductor zone, the thickness of this film being such that it can be removed easily down to the Si monocrystal by a low energy method; (b) Si is deposited on the SiO2 film and Si monocrystalline semiconductor zone exposed by the action of energy; and (c) a barrier zone consisting (partly) of polycrystalline Si is deposited on the SiO2 film.
申请公布号 DE3685020(D1) 申请公布日期 1992.05.27
申请号 DE19863685020 申请日期 1986.12.10
申请人 LICENTIA PATENT-VERWALTUNGS-GMBH, 6000 FRANKFURT, DE 发明人 KASPER, DR. RER. NAT., ERICH, W-7914 PFAFFENHOFEN, DE
分类号 H01L21/20;H01L21/203;H01L21/263;H01L21/268;H01L21/76;(IPC1-7):H01L21/76 主分类号 H01L21/20
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