| 摘要 |
PURPOSE:To improve critical current density by calcining a Bi layer-like perovskite type superconducting film while gradually raising temperature with the passage of time. CONSTITUTION:A Bi layer-like perovskite type superconducting film such as Bi-Sr-Ca-Cu-O base containing Pb, having specific thickness, is formed on a substrate by high-frequency magnetron sputtering method. Then the burning temperature is raised from room temperature to T1(850 deg.C) for about 60 minutes. At the temperature, calcining is substantially started, carried out for about successive 60 minutes and temperature is gradually raised to T2(860 deg.C) 3-8 deg.C higher than T1. At the temperature, the calcination is substantially completed, the temperature is dripped to room temperature for about 45 minutes and calcining of a superconducting film is completed to give a superconducting film comprising 11OK phase as a main phase. |
