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发明名称
APPARATUS FOR FORMING FILM
摘要
申请公布号
JPH04154691(A)
申请公布日期
1992.05.27
申请号
JP19900278570
申请日期
1990.10.17
申请人
OKI ELECTRIC IND CO LTD
发明人
OGIWARA MITSUHIKO;ABE HITOSHI
分类号
C30B23/08;H01L39/24
主分类号
C30B23/08
代理机构
代理人
主权项
地址
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