Scanning probe microscopy.

摘要

A probe (600) arranged to oppose a sample (500) is coupled to a driving portion (400) constituted by an actuator (250) capable of obtaining a large expansion/contraction amount and an actuator (350) capable of obtaining a small expansion/contraction amount. In order to keep the gap length between the sample (500) and the probe (600) constant, a first gap length control system (200) drives the actuator (250) and a second gap length control system (300) having a driving time constant smaller than that of the first gap length control system (200) drives the actuator (350) in response to changes in gap length between the sample (500) and the probe (600).