DUST MONITOR OF APPARATUS FOR MOLECULAR-BEAM EPITAXY,申请号JP19900279028-传众专利搜索

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发明名称	DUST MONITOR OF APPARATUS FOR MOLECULAR-BEAM EPITAXY
摘要
申请公布号	JPH04154692(A)	申请公布日期	1992.05.27
申请号	JP19900279028	申请日期	1990.10.19
申请人	HITACHI LTD	发明人	SHIRAYONE SHIGERU;TAKAHASHI NUSHITO
分类号	C30B23/08;H01L21/203	主分类号	C30B23/08
代理机构		代理人
主权项
地址

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