发明名称 APPARAT ZUM MESSEN EINES KRISTALLDURCHMESSERS.
摘要 An apparatus for measuring the diameter of a crystal in which an optical sensor scans along a sensing line which crosses at one point a luminous ring formed at the interface between a crystalline rod and a melt; the picture element position corresponding to a maximum luminance is discriminated when the optical sensor scans; the mean value of the picture element position is calculated over at least one revolution of the crystalline rod; and the diameter D of the crystalline rod at a portion thereof interfacing with the melt is calculated from the mean value and the level of the melt. Similarly, the minimum crystal diameter can be calculated by obtaining the picture element position corresponding to the minimum crystal diameter instead of obtaining the mean of the picture element position.
申请公布号 DE3778484(D1) 申请公布日期 1992.05.27
申请号 DE19873778484 申请日期 1987.10.17
申请人 SHIN-ETSU HANDOTAI CO., LTD., TOKIO/TOKYO, JP 发明人 KATSUOKA, NOBUO, TAKASAKI-SHI GUNMA PREF. 370, JP;HIRANO, YOSHIHIRO;OZAKI, ATSUSHI, ANNAKA-SHI GUNMA PREF. 379-01, JP;BABA, MASAHIKO, TAKEHU-SHI HUKUI PREF. 915, JP
分类号 C30B15/26;G01B11/08;H01L21/18;(IPC1-7):G01B11/08 主分类号 C30B15/26
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