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发明名称
MANUFACTURE OF MOS-TYPE SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04154162(A)
申请公布日期
1992.05.27
申请号
JP19900280393
申请日期
1990.10.18
申请人
NEC CORP
发明人
NAKADA HIDETOSHI
分类号
H01L29/78;H01L21/8234;H01L27/088;H01L29/76
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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