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发明名称
DURCHFUEHRUNG ZUM AUFBRINGEN VON HF-ENERGIE SOWIE DEREN VERWENDUNG.
摘要
申请公布号
DE58901244(D1)
申请公布日期
1992.05.27
申请号
DE19895001244
申请日期
1989.09.20
申请人
BALZERS AG, BALZERS, LI
发明人
WELLERDIECK, DR., KLAUS, CH-9470 BUCHS, CH
分类号
C23F4/00;H01G4/35;H01J37/32;H01L21/302;H01L21/3065;H01P1/06;(IPC1-7):H01J37/32;H01G4/42
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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