发明名称 METHOD FOR FORMING SHOTTKY DIODE
摘要 A method for forming a diode provided with electrodes and a semiconductive layer. Such method comprises applying ion beam irradiation to a substrate having a protruding portion at a desired position for monocrystalline diamond formation. In this manner the substrate is and subjected to surface modification thereby effecting a process for diamond crystal growth on the substrate.
申请公布号 CA2030825(A1) 申请公布日期 1992.05.27
申请号 CA19902030825 申请日期 1990.11.26
申请人 CANON KABUSHIKI KAISHA 发明人 YONEHARA, TAKAO;KAWARADA, HIROSHI;MA, JING S.;HIRAKI, AKIO
分类号 H01L21/04;H01L21/20;H01L29/16;H01L29/47;H01L29/872 主分类号 H01L21/04
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