发明名称 |
EXAMINATION OF PHYSICAL PROPERTIES OF THIN FILMS |
摘要 |
The physical properties of thin films can be examined with polarized light using a method which comprises directing polarized light at a layer system, exciting plasmon surface polaritons therein and thereby creating Raman-scattered light within the layer or layer system under examination, and imaging said light on a detector using an imaging system.
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申请公布号 |
US5116121(A) |
申请公布日期 |
1992.05.26 |
申请号 |
US19910646082 |
申请日期 |
1991.01.28 |
申请人 |
BASF AKTIENGESELLSCHAFT |
发明人 |
KNOLL, WOLFGANG;KNOBLOCH, HARALD |
分类号 |
G01N21/21;G01N21/55;G01N21/65;G01N21/84 |
主分类号 |
G01N21/21 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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