| 摘要 |
PURPOSE:To prolong significantly the life of a collet to lighten the collet and to cope with the speedup of the operation of a die bonding by a method wherein with the tip part of the collet formed of a hard abrasion-resistant material, a transfer shank is formed of a lightweight metal or a resin material. CONSTITUTION:A projected coupling part 17a is formed on a collet tip part 10, while a recess-shaped coupling part 17b is formed in a transfer shank 11, the coupling part 17a is fitted into the coupling part 17b and moreover, the coupling parts 17a and 17b are integrally fixed with a heat-resistant bonding agent or the like to form a collet 9 for die bonding use. A ceramic material containing 0.5 to 5wt.% of Al2O3, 0.5 to 5wt.% of AlN, 1 to 7wt.% of Y2O3 and 0 to 3wt.% of TiO with the remnant of Si3N4 is specially superior in abrasion resistance as the ceramic material for the tip part 10 and shown long life characteristics. As the lightweight metal for forming the shank 11, an aluminum alloy, which is superior in tenacity and structural strength, is desirable and as a resin material, a polyimide resin is the optimum. |
