Zinc diffusion process

摘要

A process is disclosed of diffusing a zinc dopant into a III-V compound substrate. To avoid degrading the substrate surface the zinc dopant source is provided by coating an organic composition comprised of a zinc organic compound chosen from the group consisting of zinc alcoholates, beta -diketonate chelates and carboxylate salts. The composition inludes at least one organic film-forming moiety containing from 5 to 30 carbon atoms.