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发明名称
MANUFACTURE OF SEMICONDUCTOR ELEMENT
摘要
申请公布号
JPH04152514(A)
申请公布日期
1992.05.26
申请号
JP19900275404
申请日期
1990.10.16
申请人
OKI ELECTRIC IND CO LTD
发明人
HARADA YUSUKE;SOGO KOHEI
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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