| 摘要 |
PURPOSE:To obtain a sensor suitable for an environmental condition for an automobile by fixing an acceleration detecting section on a base having a plurality of fixed lead terminals, and securing a can seal section sealing the aforesaid detecting section to a substrate for wiring to an electronic circuit section. CONSTITUTION:A finely processed silicon cantilever 7 is displaced, due to acceleration in a vertical direction, and a gap between movable and fixed electrodes 6 and 8 is caused to change, thereby changing capacitance. A difference in capacitance is processed in an electronic circuit, thereby obtaining output voltage to linearly change according to acceleration. Also, a detecting section 5 carrying the cantilever 7 is fixed onto a harmestic stem 3, and wired to a lead terminal 1 via wire bonding. Inert gas is sealed in a can at a dew point of -40 deg.C, thereby ensuring the inside of the can to be free from dew condensation and preventing the occurrence of electrode corrosion at a temperature level down to -40 deg.C. Also, a metal cap or the like absorbs a disturbance wave and alleviates the effect thereof. According to the aforesaid construction, an acceleration sensor can be adapted to an environmental condition for an automobile. |
