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发明名称
WASHING
摘要
申请公布号
JPH04152522(A)
申请公布日期
1992.05.26
申请号
JP19900278172
申请日期
1990.10.16
申请人
FUJITSU LTD
发明人
NAGASHIMA SETSUO
分类号
B08B11/02;H01L21/304
主分类号
B08B11/02
代理机构
代理人
主权项
地址
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