摘要 |
PURPOSE:To perform heating efficiently without decreasing the individual strengths of the main body of a sensor and the main body of a heater by forming a sensor cell part on the attaching surface side with the heater main body, and decreasing the thickness of an insulating layer at a heating part of the heater main body. CONSTITUTION:A main body A of an oxygen sensor is composed of a solid electrolyte plate 1, a cell part 4 which is formed of a measuring electrode 2 and a reference electrode 3 that are deposited and formed on the surface of the plate 1 and a lead part 5. The lead part 5 is electrically connected to the cell part 4 and takes out the electromotive force generated in the cell part 4. The electrode 2 is formed on the same plane as an attaching surface 7 of the solid electrolyte plate 1 with a main body B of a heater. Meanwhile, the main body B of the heater is constituted of a heating part 10 wherein a heating body 9 comprising W or the like is embedded in an insulating body 8 made of ceramic such as alumina and a lead part 11 for supplying power into the heating part 10. A recess part 12 is formed in the outer surface of the insulating body 8 on the attaching surface side of the heating part 10 of the heater with the sensor. The specified strength can be maintained at the heating part 10 of the heater with this recess part 12. The insulating body 8 can be made thin, and the efficient heating becomes possible. |