MANUFACTURE OF SILICON OXYNITRIDE FILM,申请号JP19900275264-传众专利搜索

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发明名称	MANUFACTURE OF SILICON OXYNITRIDE FILM
摘要
申请公布号	JPH04151839(A)	申请公布日期	1992.05.25
申请号	JP19900275264	申请日期	1990.10.16
申请人	KAWASAKI STEEL CORP	发明人	SATO NOBUYOSHI
分类号	H01L21/318;C23C16/30;H01L21/314	主分类号	H01L21/318
代理机构		代理人
主权项
地址

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