摘要 |
PURPOSE:To enable automatic focusing even if a body to be inspected is scattered in a visual field or even if the surface of the specimen is low in refractive index by providing a member which reflects projection light almost in level with the body to be inspected. CONSTITUTION:A thin film is formed on the surface of a slide glass for a microscope where the body to be inspected is mounted or the surface of a cover glass for the microscope which protects the body to be inspected. The thin film transmits visible light and reflects infrared light. Namely, the thin film 5 which is almost in level with the body and provided on the slide glass reflects the projection light of a pattern, so the image of the pattern can be light-received and the automatic focusing detection is available. Thus the automatic focusing is performed at a high speed even for the body which is extremely small like a chromosome and scattered and the body which is low in contrast. |