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发明名称
COATING APPARATUS
摘要
申请公布号
JPH04150972(A)
申请公布日期
1992.05.25
申请号
JP19900272687
申请日期
1990.10.11
申请人
TOKYO ELECTRON LTD;TOUKIYOU EREKUTORON KIYUUSHIYUU KK
发明人
GOTO KAZUYUKI;YOSHINAGA TAKASHI;FURUKAWA TAKAHIRO
分类号
G03F7/16;B05C11/08;B05D1/40;H01L21/027;H01L21/30
主分类号
G03F7/16
代理机构
代理人
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