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发明名称
OPTICAL ANTENNA
摘要
申请公布号
JPH04151529(A)
申请公布日期
1992.05.25
申请号
JP19900273294
申请日期
1990.10.15
申请人
HITACHI LTD
发明人
KATSUYAMA TOSHIO;SHIMADA JUICHI;OGAWA KENSUKE;HIRUMA TAKEYUKI;YAZAWA MASAMITSU;YAMAGUCHI KEN
分类号
G01J4/04;G01J1/00;H01L31/10;H01L35/00
主分类号
G01J4/04
代理机构
代理人
主权项
地址
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