| 摘要 |
<p>PURPOSE:To efficiently remove impurities in noble gas and to obtain high purity noble gas by bringing the noble gas containing halogen, hydrogen halide, carbon halide, hydrocarbon halide as impurities into contact with Ca or Mg. CONSTITUTION:Noble gas such as He, Ne, Ar, etc., containing impurities is refined by bringing the gas into contact with metal Ca or metal Mg as a getter (it is preferable to use Ca or Mg activated in vacuum at 400-700 deg.C for 10-200min.) at >=400 deg.C, more preferably at >=550 deg.C. These impurities are halogen gas such as fluorine, chlorine, etc., hydrogen halide such as hydrogen fluoride, hydrogen chloride, etc., or compds. comprising hydrocarbons with substitution of halogen for part or whole of hydrogen. When the concn. of impurities is high, the gas is further brought into contact with Zr, Zr-alloy, Ti or Ti alloy to remove impurities such as N2, hydrocarbon, CO, CO2, O2, H2, H2O, etc.</p> |
