SCANNING ELECTRON MICROSCOPE FOR PATTERN INSPECTION,申请号JP19900274849-传众专利搜索

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发明名称	SCANNING ELECTRON MICROSCOPE FOR PATTERN INSPECTION
摘要
申请公布号	JPH04149943(A)	申请公布日期	1992.05.22
申请号	JP19900274849	申请日期	1990.10.12
申请人	JEOL LTD	发明人	NORIOKA SETSUO;UCHIDA KUNIHIKO
分类号	H01J37/22;H01J37/28;H01L21/027	主分类号	H01J37/22
代理机构		代理人
主权项
地址

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