| 摘要 |
PURPOSE:To efficiently collate a certain pattern with a similar pattern and to calculate its collating error by selecting reference points, setting up an error between respective points on two patterns to be collated as a distance from the shortest point of the other pattern and calculating the collating error by means of sorting. CONSTITUTION:An input pattern is normalized by a pattern normalizing part 1 by using the same procedure as the normalization of a molding pattern under the control of a control circuit 3 and the normalized input pattern is sent to a pattern collating part 2. A collating circuit 10 rotates the input pattern based on a reference point selected by a reference selecting circuit 9 and successively calculates collating errors with respective molding patterns. At the time of collating the normalized pattern, reference patterns are selected from plural points separated from an origin by a fixed distance or more in an area radially extended from the origin, an error between respective points on the two patterns to be collated is defined as the shortest point on the other pattern and the collating error is efficiently calculated by means of sorting accordingly, the collation to a resembled pattern is effectively executed, and a collation error can be calculated. |
