发明名称 HIGH STRENGTH PRECISION PARTS
摘要 PURPOSE:To form precision parts having high mechanical strength and toughness, superior heat resistance, thermal stability and thermal shock resistance by adopting a compsn. consisting of yttrium oxide, aluminum oxide and zirconium oxide as a base. CONSTITUTION:Each of the title precision parts is composed of 0.5-5wt.% yttrium oxide, 10-40wt.% aluminum oxide and the balance essentially of zirconium oxide. The precision parts can be tapered and are suitably utilizable as wire bonding capillaries enabling high density wire bonding.
申请公布号 JPH04149065(A) 申请公布日期 1992.05.22
申请号 JP19900272432 申请日期 1990.10.12
申请人 TOSHIBA CORP 发明人 SAYANO AKIO;SHIODA TAKESHI
分类号 C04B35/48;G02B6/36;H01L21/60 主分类号 C04B35/48
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