摘要 |
PURPOSE:To form precision parts having high mechanical strength and toughness, superior heat resistance, thermal stability and thermal shock resistance by adopting a compsn. consisting of yttrium oxide, aluminum oxide and zirconium oxide as a base. CONSTITUTION:Each of the title precision parts is composed of 0.5-5wt.% yttrium oxide, 10-40wt.% aluminum oxide and the balance essentially of zirconium oxide. The precision parts can be tapered and are suitably utilizable as wire bonding capillaries enabling high density wire bonding. |