VERFAHREN ZUM BILDEN EINER FELDOXIDSCHICHT EINES HALBLEITERBAUTEILS,申请号DE19914109184-传众专利搜索

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发明名称	VERFAHREN ZUM BILDEN EINER FELDOXIDSCHICHT EINES HALBLEITERBAUTEILS
摘要
申请公布号	DE4109184(A1)	申请公布日期	1992.05.21
申请号	DE19914109184	申请日期	1991.03.20
申请人	SAMSUNG ELECTRONICS CO., LTD., SUWON, KR	发明人	PAEK, WEON-SIK;JANG, TAEK-YONG;CHOI, WEON-TAEK, SEOUL/SOUL, KR
分类号	H01L21/302;H01L21/3065;H01L21/316;H01L21/32;H01L21/76;H01L21/762	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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