| 摘要 |
PURPOSE:To obtain high inspection precision and to reduce the cost of an imager through use of only a lens with one kind of magnification by picking up images in several operations and by inspecting relative positional coordinates of wires obtained by each imaging in a unified absolute coordinate system. CONSTITUTION:When a wire 2 is too long to completely fit into one imaging area with dimensions Lx, Ly, a X-Y table 15 moves by control of a X-Y table controller 16 on the basis of instruction from a main controller 17 to move an imager 14 to a first imaging area 201, thereby picking up image for conversion into image signal. This image signal is subjected to image processing so that positional coordinates 31-33 of each point of the bonding wire 2 are determined. Conversion into coordinate positions 31a-31b in the absolute coordinate system is made on the basis of a semiconductor chip 1 in an image processing inspector 20. Thus, positional coordinates of all bonding wires 2 are unified into one absolute coordinate system with the result that wires 2 are inspected by the image processing inspector 20. |
