| 摘要 |
<p>PURPOSE:To enable a high-speed measurement signal to be measured with a high S/N ratio by measuring a voltage waveform of a circuit to be measured based on an output of a calculation circuit. CONSTITUTION:This device is provided with an electric optical element 31 which changes a polarization surface by an electric field corresponding to an operation voltage of a circuit 15 to be measured by entering an output light of an optical pulse generation means 10 which outputs optical pulses with an optical frequency of light; a laser light source 20 which outputs a continuous light with a second optical frequency; a synthesizing means 22 for synthesizing both; a light-receiving element 23 which receives an output light of the means 22; and a calculation circuit 24 which calculates voltage waveform of the circuit to be measured 15 based on this output. A polarization surface of optical pulses with the first optical frequency is rotated by an electric optical element 31 and is entered into the light-receiving element 23 along with a local oscillation light with the second optical frequency for performing optical frequency heterodyne detection, thus enabling signal to the amplified equivalently and internal voltage waveform of the circuit to be measured 15 is measured with a high S/N ratio.</p> |
