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发明名称
METHOD AND DEVICE FOR FORMING MULTI-LAYERED FILM
摘要
申请公布号
JPH04147614(A)
申请公布日期
1992.05.21
申请号
JP19900270481
申请日期
1990.10.11
申请人
CANON INC
发明人
TANAKA ICHIRO
分类号
H01L21/205;H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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