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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04148558(A)
申请公布日期
1992.05.21
申请号
JP19900273885
申请日期
1990.10.12
申请人
FUJITSU LTD
发明人
SUZUKI TOSHIAKI;MURAKAMI YOJI;KOBAYASHI MASAO;KASAI JUNICHI
分类号
H01L21/56;H01L23/50
主分类号
H01L21/56
代理机构
代理人
主权项
地址
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