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发明名称
THROUGH-TYPE MAGNETRON SPUTTERING SYSTEM
摘要
申请公布号
JPH04147971(A)
申请公布日期
1992.05.21
申请号
JP19900272996
申请日期
1990.10.11
申请人
MITSUBISHI KASEI CORP
发明人
ARITA YOJI
分类号
C23C14/35
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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