AIR CLEANER DEVICE,申请号JP19900273027-传众专利搜索

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发明名称	AIR CLEANER DEVICE
摘要
申请公布号	JPH04147609(A)	申请公布日期	1992.05.21
申请号	JP19900273027	申请日期	1990.10.09
申请人	TOKYO ELECTRON SAGAMI LTD	发明人	YAMAGA KENICHI
分类号	F24F7/06;B01D46/00;H01L21/02;H01L21/30	主分类号	F24F7/06
代理机构		代理人
主权项
地址

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