VORRICHTUNG FUER DEN TRANSPORT VON SUBSTRATEN,申请号DE19904036339-传众专利搜索

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发明名称	VORRICHTUNG FUER DEN TRANSPORT VON SUBSTRATEN
摘要
申请公布号	DE4036339(A1)	申请公布日期	1992.05.21
申请号	DE19904036339	申请日期	1990.11.15
申请人	LEYBOLD AG, 6450 HANAU, DE	发明人	MAHLER, PETER, DIPL.-ING., 6452 HAINBURG, DE;NAEHRING, HERBERT, DIPL.-ING., 6458 RODENBACH, DE
分类号	C23C14/50;B65G49/07;C23C14/56;H01L21/677;H05K13/00	主分类号	C23C14/50
代理机构		代理人
主权项
地址

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