| 摘要 |
PURPOSE:To select the optimum lighting direction according to the inspection items by a method wherein a control means selects the multiple lighting means corresponding to the inspected positions to control the manipulations of the selected lighting means. CONSTITUTION:The title inspection device is provided with three kinds of lighting means i.e., a downward lighting means 2, a transmission lighting means 3 and a ring lighting means 4. Respective lighting means 2-4 are connected to the power supplies 2a-4a feeding power respectively connected to an automatic control system 1. The ON.OFF manipulations of the power supplies 2a-4a are automatically controlled by the automatic control system 1 according to the inspection items. Within respective lighting means, a wire 17 is junctioned between the semiconductor chip 11 mounted on a bed 13 and a lead 14. A camera 21 photographing the wire 17 as the inspection object is arranged above the bed 13. On the other hand, said three kinds of lighting means are respectively arranged around the inspection object. That is, the downward lighting means 2 is positioned above the semiconductor chip 11 while the transmission lighting means 3 is arranged beneath the semiconductor chip 11. Finally, the ring lighting means 4 having a ring shape are arranged as if encircling the semiconductor chip 11. |
