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发明名称
SOLDERLESS MBE SYSTEM
摘要
申请公布号
EP0145285(B1)
申请公布日期
1992.05.20
申请号
EP19840307753
申请日期
1984.11.09
申请人
TEXAS INSTRUMENTS INCORPORATED
发明人
SHIH, HUNG-DAH;BENNETT, TOMMY JOE
分类号
H01L21/203;C30B23/02;H01L21/26;H01L21/677
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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