| 摘要 |
<p>PURPOSE:To enable the alignment by the reference surface of an aligned body whose one end only is precisely set up by machining steps to be made easily and accurately by a method wherein the thrust by the alignment member on the reference surface side of an alignment object is set up larger than the thrust on the other end side. CONSTITUTION:The thrust of an air cylinder 3 on the reference surface 1a side is set up larger by specifying the air pressure fed to the air cylinder 3 on the reference surface 1a side to be 5Kg/cm<2>, i.e., larger than the air pressure of 3Kg/cm<2> fed to the other air cylinder 4. At this time, since the thrust of the air cylinder 4 is set up smaller than the thrust of the air cylinder 3 on the reference substrate 1a side, even if the distance (l) between the ends 1a and 1b is machined longer or shorter within the specific range of allowable error, the alignment of the reference surface 1a does not get out of order. Furthermore, even if the parallelism between the other end 1b and the reference surface 1a gets out of order, a wafer boat 1 can be aligned with the specific position since the central part of an alignment member 9 is fitted to the end of this air cylinder 4 rockingly movably.</p> |
