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发明名称
SEMICONDUCTOR TESTER
摘要
申请公布号
JPH04147070(A)
申请公布日期
1992.05.20
申请号
JP19900272649
申请日期
1990.10.09
申请人
MITSUBISHI ELECTRIC CORP
发明人
OKAMOTO YASUSHI
分类号
G01R31/3183;G01R31/28;H01L21/66
主分类号
G01R31/3183
代理机构
代理人
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地址
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