| 摘要 |
PURPOSE:To detect very accurately and easily the relative inclination of an acoustic lens and a sample by delaying the signal output from one of secondary piezo electric elements selected among the elements and operating a tilt angle with the delay time when the composite signal has the maximum amplitude. CONSTITUTION:A recessed side part 21b is provided to the face to a sample 4 and a piezoelectric element 22 of a probe 23 to the top 21a of the opposite side respectively in an acoustic lens 21. The reflected wave signals from the sample 4 generated by the excitation of the element 22 are received by this microscope and the prescribed process is made. Delay circuits 28a and 28b connected to two at least of secondary piezoelectric elements 22a to 22d of three or more pieces in the circumference of the element 22 give the output signal a delay in this time and plural output signals containing one signal at least delayed are selected 27. Delays are given in order by a delay controller 29 and controlled for the composite signal to become the maximum. The tilt angle of the sample 4 is operated from this control quantity and the sample 4 can be very accurately made a parallel state by the operation of a tilt angle compensator 8 based on this. |
