| 摘要 |
PURPOSE:To reduce noise and to detect a tunnel current with excellent S/N by providing a shield electrode among a drive electrode, a leadout electrode and a probe. CONSTITUTION:A probe is formed with a cantilever made of a piezoelectric bimorph whose one end is fixed onto a Si substrate, the piezoelectric bimorph layer consists of 2-split electrodes 2a, 2b, a piezoelectric layer 5, a common electrode 3, a piezoelectric layer 5 and 2-split electrodes 4a, 4b and each electrode is prolonged up to a fixed end of the cantilever and a pad 13 is provided thereto and connected to an external drive circuit by wire bonding or the like. Furthermore, a shield electrode 1 is formed on the 2-split electrodes 2a, 2b of the piezoelectric bimorph layer via an insulation layer 10, and a leadout electrode and the probe 7 are provided similarly on the electrodes via the insulation layer 10. Thus, noise induced from the drive electrodes 2 - 4 to the probe 7 and the leadout electrode 6 is reduced and a tunnel current with excellent S/N is detected. |
