发明名称 |
APPARATUS FOR PERFORMING IN-FEED OF WORKING MEMBER TO WORKING STATION |
摘要 |
An apparatus for performing an exact in-feed in the X and/or Y direction in the plane of a bond head, e.g. a gripper, to a working station containing a sliding plate, a support element, a first and second drives for performing the in-feeds, a guide mechanism provided with a slide part and a guide part and an integrated measuring device for determining movements of the support element oriented in the X and/or Y direction. The support element is mounted in the horizontal plane with translational and rotational degrees of freedom by a vacuum-pressurizable air bearing on the sliding plate and vertically by a vacuum-pressurizable air bearing on the slide part, the latter additionally being mounted with a vacuum-pressurizable air bearing on the sliding plate and with a counterpressure air bearing between two webs of the guide part. |
申请公布号 |
US5114302(A) |
申请公布日期 |
1992.05.19 |
申请号 |
US19880274865 |
申请日期 |
1988.11.22 |
申请人 |
ESEC SA |
发明人 |
MEISSER, CLAUDIO;EGGENSCHWILER, HANS;NEHLS, WALTER |
分类号 |
B21D43/00;B23K20/00;B23Q1/00;B23Q1/26;B23Q1/38;B23Q1/48;B23Q1/62;B23Q7/08;F16C32/06;G05D3/00;H02K5/16;H02K41/035 |
主分类号 |
B21D43/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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