| 摘要 |
A metal-screened ceramic package is formed by preparing a mixture including a fine metal powder and a coarse metal powder, preheating the metal powder mixture and simultaneously controlling the oxygen partial pressure and dew point in a furnace in which the mixture is pre-conditioned, to thereby form a metal paste, screning the paste on a green ceramic sheet, and co-firing the resulting screened metal paste and the green ceramic sheet in order to control the shrinkage of the metal paste and to provide a uniform sheet resistance.
|
