| 摘要 |
PURPOSE:To form the color filter which has superior uniformity by changing a low-class oxide into a conductive oxide film in a thermosetting process which is performed after electrodeposited film formation. CONSTITUTION:On a substrate 50, an ITO transparent conductive thin film is formed by using a target of an indium-tin oxide, and on this thin film, a transparent electrode 51 is formed of an oxide containing at least two kinds among indium, tin, antimony, cadmium, and zinc. Then the low-class oxide 52 of indium, tin, etc., is obtained as a surface reduction layer of ITO, a constant voltage is impressed onto the transparent electrode 51 by using electrodepositing liquid to make electricity flow by a constant quantity, and thus metal ions in the electrodeposited paint are converted into an oxide after electrodeposition (thermal decomposition or thermal oxidation) to obtain the color filter which is converted into a conductive material. Consequently, nonuniformity of the conductive electrodeposited film is eliminated and the conductivity is given without spoiling smoothness. |
