| 摘要 |
PURPOSE:To decrease the number of processes, to suppress deterioration in the characteristics of the optical waveguide and its substrate in insulating layer peeling operation, and to improve the characteristics of the optical waveguide by adhering an insulating layer to the surface of the substrate and making a proton exchange through the insulating layer. CONSTITUTION:While the insulating layer 2 is adhered onto the substrate 1, the optical waveguide 6 is manufactured by the proton exchanging method. Thus, the optical waveguide 6 can be formed by the proton exchanging method even while the insulating layer 6 is adhered. Therefore, such trouble that the surface of nonlinear optical crystal is roughened by mirror polishing, etc., is evaded because the optical waveguide 6 is manufacture without removing the insulating layer 2. Consequently, an optical waveguide device which has excellent characteristics is obtained and the productivity is improved because of the improvement of the yield and a decrease of man-hours. |
