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经营范围
发明名称
ION SOURCE
摘要
申请公布号
JPH04144048(A)
申请公布日期
1992.05.18
申请号
JP19900268651
申请日期
1990.10.05
申请人
NISSIN ELECTRIC CO LTD
发明人
TANJIYOU MASAYASU;NAKAZATO HIROSHI
分类号
C23C14/48;H01J27/02;H01J37/05;H01J37/08;H01J49/10;H01J49/28
主分类号
C23C14/48
代理机构
代理人
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地址
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