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发明名称
THIN FILM FORMING DEVICE AND METHOD FOR EXCHANGING SAMPLE AND TARGET
摘要
申请公布号
JPH04143271(A)
申请公布日期
1992.05.18
申请号
JP19900267964
申请日期
1990.10.05
申请人
FUJI ELECTRIC CO LTD
发明人
YAGINUMA SADAHIRO
分类号
C23C14/34;H01L21/203
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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