| 摘要 |
PURPOSE:To ensure an interval between probes of a tester when a wafer test is executed by a method wherein, in addition to a bonding pad, a pad, for probing which is used to execute the wafer test is formed of a metal interconnection on an upper layer which is situated by another layer. CONSTITUTION:Metal interconnections 4 are formed in such a way that they connect pads 2 to pads 3 for probing use which are formed at the inside of a chip situated on an upper layer from a chip constitution and which are used to execute a wafer test. The bonding pads 2 are connected to an input, an output, a GND and a power supply of a semiconductor integrated circuit at the inside of a chip; the pads 3 for probing use are connected to them. When the pads 3 for probing and the bonding pads 3 are used jointly, an interval between the pads can be made large. Thereby, a probe for a tester can be brought into contact with all the pads 2, 3 in the same manner as in the case where all the bonding pads are probed. |
