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发明名称
FACE CHARACTERISTIC MEASURING METHOD FOR PLANE MIRROR AND STAGE DEVICE WITH THIS MEASURING FUNCTION
摘要
申请公布号
JPH04142438(A)
申请公布日期
1992.05.15
申请号
JP19900265576
申请日期
1990.10.03
申请人
NIKON CORP
发明人
HAZAMA JUNJI
分类号
G12B5/00;G01M11/00;G02B5/08
主分类号
G12B5/00
代理机构
代理人
主权项
地址
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