| 摘要 |
Vacuum pump with magnetic suspension comprising a stator (4A, 4B) and a rotor (5) rotatably driven by an electric motor (9, 10) integrated in to the pump, the said suspension comprising at least one active radial bearing (14, 15, 16) associated with at least two position detectors (17) located at 90 DEG with respect to each other in a plane perpendicular to the axis z of the pump, characterised in that the said position detectors (17) are located in the plane of action (P) of the said active radial bearing (14, 15, 16). <IMAGE>
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