CHECKING METHOD FOR IMPURITY DEGREE OF SEMICONDUCTOR DEVICE

摘要

In a measuring method for speading resistance and impurity concentration of semiconductor board, two probes measure spreading resistance downwardly of a semicomductor board on a slope of an angle of inclination. Impurity concentration is known from the spreading resistance mearsured. For two dimensional measurement spreading resistance is measured on a slope of angles of inclination in the planes of X-Y and X-Z.