APPARATUS FOR TREATING USELESS PHOTOSENSITIVE MATERIAL

摘要

A central acetone supplying tank (2) stores acetone to supply it to a plurality of waste fluid tanks (3, 3-1,...3-n) of a purifying room. A central waste fluid tank (92) treats the waste fluid by receiving it from the waste fluid tanks (3, 3-1, ... 3-n), and purifies the waste fluid at the outside of the purifying room. Another set of waste fluid tanks focus the waste photoresist fluid and acetone to the central waste fluid tank (2). Thus, the purifying room is not likely to be contaminated, and the transfer and treatment of the waste fluid are automatically carried out, thereby excluding safety problem.